EQUIPMENTS

Clean booth (yellow room)

Clean booth (room light type)

Photolothography mask aligner & exposure

sputter

Vacuum evaporation chamber for organic materials x2

Vacuum evaporation chamber for metals x2

Scanning electron microscope

Atmic force microscope x2

N2 Grove box

Vacuum prober

Ambient prober

Elecrometer

Source meter

4-probe electrical measurement instruments

Impedance analyzer

Network analyzer

spin coater

Optical microscope x2

Digital microscope

Ultrasonic welder x2

Parylene coater x2

UV/O3 cleaner

Si wafer oxidization furnace

Contact angle measurement system

Field Effect Transistor electrical measurement instruments

Thermally stimulatied current measurement system

Monochrometer and optical measurement systems

Electrical measurement system under high pressure

Laser cutter